FY26 User Fees (July 1, 2025 - June 30, 2026)
Types of Users
We charge different rates for different types of users. In the charts below:
- Internal includes users affiliated with The University of Chicago, Argonne National Laboratory, Fermi National Accelerator Laboratory, The University of Illinois at Chicago, Northwestern University, Rush System, Illinois Tech, and Loyola University Chicago.
- Non-profit includes users affiliated with other academic institutions, non-for-profit organizations, and the government.
- Industrial includes all other users.
Training & Access Fees
| Internal | Non-Profit | Industrial | |
| Start-up Fee* | $578 | $860 | $1700 |
*One time fee. Includes all trainings (facility and tools), cleanroom garments, PPE, and administrative costs. No additional training or access fees are required to become a PNF User.
CleanRoom Access Fees
| Internal | Non-Profit | Industrial | |
|---|---|---|---|
| Cleanroom Access/Hour – 8am - 5pm, Mon-Fri | $40 | $64 | $116 |
| Cleanroom Access/Hour – 5pm - 8am & Weekends | $25 | $38 | $65 |
| Cleanroom Access/Hour - Observer rate** | $10 | $19 | $35 |
**Principal Investigators may request special approval for researchers to enter the PNF as observers, at a reduced hourly fee. PNF Observers are required to complete the same safety trainings as regular PNF users, must always be accompanied by an approved user, may only enter during business hours, and will not have access to tools/equipment. Observers who request User access after completing up to 30 hours of documented observation time may request that their observer fees be credited towards the PNF start-up fee. If at any time a researcher enters the PNF as an observer and is discovered processing samples, then they will be charged the start-up fee and will not receive any credit from their previous observer fees.
Equipment Fees
| Internal | Non-Profit | Industrial | |
|---|---|---|---|
| Tier 4 Tools (Raith E-beam) | $175 | $309 | $450 |
Remote Processing/Special Project Fees
| Internal | Non-Profit | Industrial | |
|---|---|---|---|
| Staff Support | $73 | $100 | $250 |
Supplies
| Internal | Non-Profit | Industrial | |
|---|---|---|---|
| Wafers | Pass through | Pass through |
Pass through |
Training and Access Fees include
- Access credentials
- Gowning fees
- Training
Cleanroom Access Fees are hourly and include
- Access to cleanroom
- Access to Tier 0-3 tools for trained users
- Incidental supplies (common solvents, developers, photoresist, etc.)
- Staff support during business hours
Equipment Fees for Tier 4 tools (Raith E-beam)
- Hourly usage fees charged in addition to hourly cleanroom access fees
Remote Processing/Special Project Fees
- Hourly fees for specific staff involvement to provide remote processing services or to support a special project
- Additional cleanroom access fees & equipment fees will apply as required
- The Remote Work Inquiry form may be submitted to initiate a potential remote work project.
Click HERE for the payment screen to pay PNF fees by credit card.
*Please note that we do not offer refunds for credit card payments.