Gerwin Koolstra & Abigail Shearrow
"Microwave resonators perform best when they're made of very pure superconductors. Usually thin superconductors don't work well for this purpose, since superconductivity tends to break down. Surprisingly a superconducting TiN film such as the one depicted here works great. We used Atomic Layer Deposition to create a film of only 8 nm thick and still reach quality factors of over 100,000. It's so thin you can hardly see the lithographically defined resonators"
