KLA-Tencor P-7 Surface Profilometer
Overview
The KLA-Tencor P-7 Surface Profilometer is a research grade stylus profiler for surface metrology and measurement. The KLA-Tencor P-7 is software equipped with parameters for a wide range of measurements including depth, step height, roughness, waviness, slop, flatness, distance, bearing ratio, radius of curvature, and more.
Key Features
Sample size to 150 mm with 150 mm scan length
1 mm Z-range
2 μm radius stylus
Apex software for a variety of measurement parameters, customized reports and automatic processing of data
3D imaging
2D stress analysis
Step height repeatability
Thin and Thick film step heights
Etched trench depth
Key Applications
Semiconductors
MEMS
Data Storage
Opto-electronics
Solar technology
General Documentation
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