Horiba UVISEL 2 Spectroscopic Ellipsometer
Overview
The UVISEL 2 is an accurate and sensitive ellipsometer and includes a wide range of integrated automated features useful for the investigation of all materials. The UVISEL 2 is simple to operate and has the performance required for characterizing all current materials as well as the next generation of materials and structures.
Key Features
- The smallest possible achromatic spot size of 35 μ capable of covering a large spectral range from FUV to NIR for measurement of very small sample areas
Computer controlled Microspots
- Choice of 8 different spot sizes to suit the feature size of sample
- Achromatic microspot optics down to 35 µm
Computer controlled variable angle goniometer
- Angle range 35° - 90°
- Allows Variable Angle Spectroscopic Ellipsometry
- A sample vision coupled with automated spot selection for accurate positioning of the measurement spot and region on the sample
Key Applications
General Documentation
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