The UVISEL 2 is an accurate and sensitive ellipsometer and includes a wide range of integrated automated features useful for the investigation of all materials. The UVISEL 2 is simple to operate and has the performance required for characterizing all current materials as well as the next generation of materials and structures.
The smallest possible achromatic spot size of 35 μ capable of covering a large spectral range from FUV to NIR for measurement of very small sample areas
Computer controlled Microspots
- Choice of 8 different spot sizes to suit the feature size of sample
- Achromatic microspot optics down to 35 µm
Computer controlled variable angle goniometer
- Angle range 35° - 90°
- Allows Variable Angle Spectroscopic Ellipsometry
A sample vision coupled with automated spot selection for accurate positioning of the measurement spot and region on the sample
Characterization
