FEI Quanta 650 FEG SEM with Nabity Pattern Generator
Overview
The FEI Quanta 650 FEG SEM (Scanning Electron Microscope) is a variable pressure microscope used for high resolution imaging. It is capable of resolving features on a scale of less than 5 nm. It is equipped with a Field Emission Gun (FEG) which allows for bright-field and dark-field sample imaging. The SEM is equipped with a total of 8 detectors for the purpose of imaging and analysis as well as a Nabity Nanometer Pattern Generation System (NPGS) which allows for advanced electron beam lithography by means of the SEM.
Key Features
Variable Pressure mode with pressures of 100 - 200 Pa
High Vacuum mode with pressures of 10-2 - 10-4 Pa
Beam Deceleration (BD) mode for high resolution backscatter electron (BSE) imaging
Samples to 6”
Electron Backscatter Diffraction (EBSD) for crystallinity research
Nabity Nanometer Pattern Generation System (NPGS)
STEM I detector for dry, thin, conductive, electron transmissive samples
STEM II detector for wet, thin, electron transmissive samples
Micro-analysis of conductive and non-conductive samples
Gaseous SE Detector (GSED)
Everhart-Thornley Detector (E-TD) for dry, conductive samples
Large Field Detector (LFD) for dry, non-conductive samples in low vacuum conditions (0.08 -1.5 Torr)
MAPS software for tiling and creating large montage images at high resolution
Key Applications
Microscopy of conductive and non-conductive samples
NPGS for electron beam lithography
Imaging of dry and wet samples
Elemental analysis through mapping, spectrum quantification, line scanning
General Documentation
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