Process Benches

The PNF is equipped with a number of specialized wet benches suitable for wafer cleaning, coating, developing, and etching.

WAFAB Acid/Base Bench

The WAFAB Manual Acid/Base Bench is a non-automated front-acces wet bench designed to handle acidic and basic materials without degrading.

WAFAB Bottle Washer Bench

The WAFAB Manual Bottle Washer is a non-automated wet station designed for washing glassware used in various processes and dispoing of waster water.

WAFAB Cleaning Bench

The WAFAB Cleaning Bench is a non-automated front-access wet bench designed for cleaning wafers before further processing.

WAFAB Developer Bench

The WAFAB Manual Developer Bench is a non-automated front-access wet bench designed to handle chemicals used for developing photoresist.

WAFAB HF/TMAH Bench

The WAFAB Manual Solvent Bench is a non-automated front-access wet bench designed to handle hydrofluoric acid and tetramethylammonium hydroxide used in etching.

WAFAB Solvent Bench

The WAFAB Manual Solvent Bench is a non-automated front-access wet bench designed to handle solvents used for cleaning substrates.

WAFAB Toxic Corrosives Bench

The WAFAB Manual Toxic Corrosives Bench is a non-automated front-access wet bench deigned to handle, contain, and properly dispose of toxic and corrosive materials.