Process Benches
The PNF is equipped with a number of specialized wet benches suitable for wafer cleaning, coating, developing, and etching.
- WAFAB Acid/Base Bench
The WAFAB Manual Acid/Base Bench is a non-automated front-acces wet bench designed to handle acidic and basic materials without degrading.
- WAFAB Bottle Washer Bench
The WAFAB Manual Bottle Washer is a non-automated wet station designed for washing glassware used in various processes and dispoing of waster water.
- WAFAB Cleaning Bench
The WAFAB Cleaning Bench is a non-automated front-access wet bench designed for cleaning wafers before further processing.
- WAFAB Developer Bench
The WAFAB Manual Developer Bench is a non-automated front-access wet bench designed to handle chemicals used for developing photoresist.
- WAFAB HF/TMAH Bench
The WAFAB Manual Solvent Bench is a non-automated front-access wet bench designed to handle hydrofluoric acid and tetramethylammonium hydroxide used in etching.
- WAFAB Solvent Bench
The WAFAB Manual Solvent Bench is a non-automated front-access wet bench designed to handle solvents used for cleaning substrates.
- WAFAB Toxic Corrosives Bench
The WAFAB Manual Toxic Corrosives Bench is a non-automated front-access wet bench deigned to handle, contain, and properly dispose of toxic and corrosive materials.