Overview
The AZ 726 MIF Developer is a metal ion free developer with a small amount of added wetting agent to provide fast and uniform puddle build up. It consists of an aqueous solution of 2.38% tetramethyl-ammonium-hydroxide.
AZ 726 MIF Developer
Features
- Uniformity even on 8" wafers due to wetting agent
- Concentrations of Na, K, Mg, Fe, AI below 5ppb
- Designed to limit carbon dioxide absorption
- High standard in batch-to-batch consistency
Hazards
- Serious eye irritation
- Irritating to skin
- May be corrosive to metals
- Harmful if swallowed
Safety
- Do not eat, drink or smoke while handling
- Wash skin thoroughly after handling
- Wear chemical resistant eye protection, protective gloves and clothing
General Documentation
Storage and Waste
- Storage: Developer
- Waste: DEV 1 & 2