Overview
The YES Vapor Prime and Image Reversal Oven utilizes NH3 vapor to allow the creation of negative images using a positive photo-resist.
YES-58TA Vacuum Bake/HMDS Vapor Prime and Image Reversal System
Key Features
Operation temperature ambient to 180° C
1 load/hour image reversal bake throughput
2 loads/hour vacuum bake/vapor prime throughput
Handles wafers up to 300 mm
Fully programmable process time and temperature
Key Applications
Image reversal bake
Vapor prime
Vacuum bake
