Overview
The YES Vapor Prime and Image Reversal Oven utilizes NH3 vapor to allow the creation of negative images using a positive photo-resist.
YES-58TA Vacuum Bake/HMDS Vapor Prime and Image Reversal System
Key Features
- Operation temperature ambient to 180° C
- 1 load/hour image reversal bake throughput
- 2 loads/hour vacuum bake/vapor prime throughput
- Handles wafers up to 300 mm
- Fully programmable process time and temperature
Key Applications
- Image reversal bake
- Vapor prime
- Vacuum bake
General Documentation
Contact
Jered Feldman
Process Manager
+1 (773) 834-7564
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Equipment Fee
Tier 0
