Overview
The MJB4 is a high precision manual mask aligner that works with small substrates, wafers, and pieces. It is frequently used for MEMS and optoelectronic applications. It can handle fragile III-V materials.
The MJB4 is a high precision manual mask aligner that works with small substrates, wafers, and pieces. It is frequently used for MEMS and optoelectronic applications. It can handle fragile III-V materials.
High resolution prints down to 0.5 μm
Universal Optics option for UV 250, UV 350 and UV 400
Wafers and Substrates to 100 mm
Thickness of mask up 9 mm
Soft, hard, and vacuum contact
SUSS single field microscope
Diffraction reducing optics
Wedge Error Compensation (WEC)
Top side and infrared alignment
LED Lithography
MEMS
UV-NIL