Overview
The MJB4 is a high precision manual mask aligner that works with small substrates, wafers, and pieces. It is frequently used for MEMS and optoelectronic applications. It can handle fragile III-V materials.
SUSS MJB4 Manual Mask Aligner
Key Features
High resolution prints down to 0.5 μm
- Universal Optics option for UV 250, UV 350 and UV 400
- Wafers and Substrates to 100 mm
- Thickness of mask up 9 mm
- Soft, hard, and vacuum contact
- SUSS single field microscope
- Diffraction reducing optics
- Wedge Error Compensation (WEC)
- Top side and infrared alignment
Key Applications
- LED Lithography
- MEMS
- UV-NIL
General Documentation
Contact
Jered Feldman
Process Manager
+1 (773) 834-7564
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Equipment Fee
Tier 0
