Overview
The MJB4 is a high precision manual mask aligner that works with small substrates, wafers, and pieces. It is frequently used for MEMS and optoelectronic applications. It can handle fragile III-V materials.
SUSS MJB4 Manual Mask Aligner
Key Features
High resolution prints down to 0.5 μm
Universal Optics option for UV 250, UV 350 and UV 400
Wafers and Substrates to 100 mm
Thickness of mask up 9 mm
Soft, hard, and vacuum contact
SUSS single field microscope
Diffraction reducing optics
Wedge Error Compensation (WEC)
Top side and infrared alignment
Key Applications
LED Lithography
MEMS
UV-NIL
