EBARA EV-A06-1 Vacuum Pump
Overview
The EBARA EV-A06-1 Vacuum Pump is an air cooled dry vacuum pump which offers high pumping speeds (21.6 cfm) and high water vapor pumping (350 g/hr) The PNF uses a standardized set of EBARA pumps throughout the facility to reduce equipment downtime.
Key Features
- Pumping speeds of 21.6 cfm
- Weight of 54 kg
- Pressures of 1.0 - 10.0 Pa depending on gas ballast
- No-Contact Design
- Highest water vapor pumping, at 350 g/hr, for a dry vacuum pump
Key Applications
- Load Lock
- Electron Microscopes
- PVD
- Oxygen Plasma Systems
- Analytical Instruments
General Documentation
- Related Equipment Categories
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