Bachur and Associates UV Flood Exposure System


The system’s exposure optics employ a proven, high performance optic train that employs an elliptical reflector, dielectric heat removing primary and secondary mirrors, a multi-element optical integrator system and collimating optics.  The optical integrator system produces non-coherent radiation that virtually eliminates the detrimental effects of diffraction.  These high intensity systems can resolve fine structures even in thick resist.  

Key Features

Key Applications

General Documentation