Angstrom EvoVac Electron Beam Evaporator
Overview
The Angstrom EvoVac Electron Beam Evaporator is a PVD tool which evaporates high melting point materials, such as refractory metals and ceramics, using an electron beam. The EvoVac provides multiple sources of flexibility in its deposition system including resistive thermal evaporation, ion assisted and sputter deposition, as well as principal electron beam evaporation.
Key Features
6 pocket E-beam source
12 cc crucibles
Programmable 2-axis sweep controller
Wafers to 6”
Temperatures to 400 °C
High deposition rate
Advanced multi-layer deposition control for precise layer monitoring
Sensor guided co-deposition to prevent interference from adjacent source material
Pneumatic airline filter
Substrate heating, cooling, and biasing
Long source to substrate distances
Key Applications
General Documentation
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