Angstrom EvoVac Electron Beam Evaporator
Overview
The Angstrom EvoVac Electron Beam Evaporator is a load locked PVD tool which evaporates high melting point materials, such as refractory metals and ceramics, using an electron beam. The EvoVac provides multiple sources of flexibility in its deposition system including resistive thermal evaporation, ion assisted and sputter deposition, as well as principal electron beam evaporation.
Key Features
6 pocket E-beam source
15 cc crucibles
Programmable 2-axis sweep controller
Wafers to 6”
High deposition rate
Advanced multi-layer deposition control for precise layer monitoring
Pneumatic airline filter
Long source to substrate distances
Kaufman gridless ion source
- ion beam assisted deposition
- in-situ substrate pre-cleaning
- low energy ion beam etching
- surface modification
Key Applications
General Documentation
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