Ancillary
Ancillary equipment supports a range of essential techniques for cleanroom processes.
- EBARA ESR20N Vacuum Pump
The EBARA ESR20N Vacuum Pump is an ESR (Energy Saving Roots) multistage dry vacuum pump. It is engineered for clean to medium processes and has minimum nitrogren purge requirements with no nitrogen purge requirements for clean processes. The PNF uses a standardized set of EBARA pumps throughout the facility to reduce equipment downtime.
- EBARA EV-A03-1 Vacuum Pump
The EBARA EV-A03-1 Vacuum Pump is a small, air cooled dry vacuum pump which offers high pumping speeds (9 cfm) and a no-contact design. The PNF uses a standardized set of EBARA pumps throughout the facility to reduce equipment downtime.
- EBARA EV-A06-1 Vacuum Pump
The EBARA EV-A06-1 Vacuum Pump is an air cooled dry vacuum pump which offers high pumping speeds (21.6 cfm) and high water vapor pumping (350 g/hr) The PNF uses a standardized set of EBARA pumps throughout the facility to reduce equipment downtime.
- EMS 1300 Critical Point Dryer
The procedure of critical point drying is an efficient method for drying delicate samples for SEM applications. The EMS 1300 Critical Point Dryer provides a clear view of the fluid level and visibility of the phase change at the critical point.
- Pfeiffer HiCube 80 Turbo Pumping Station
The HiCube 80 is a versatile, mobile Turbo Pimping Station. It uses a HiPace turbo pump as well as a backing pump that are inter-coordinated for a wide range of applications and fast pump downtime.
- Pfeiffer Vacuum ADIXEN ASM 380 Leak Detector
The ASM 380 is a high performance, mobile, leak detector. It has an ACP 40 dry backing pump and a high vacuum pump which allows for high testing sensitivity and short pump down times, even for large volumes.